JPH0365238U - - Google Patents
Info
- Publication number
- JPH0365238U JPH0365238U JP12683689U JP12683689U JPH0365238U JP H0365238 U JPH0365238 U JP H0365238U JP 12683689 U JP12683689 U JP 12683689U JP 12683689 U JP12683689 U JP 12683689U JP H0365238 U JPH0365238 U JP H0365238U
- Authority
- JP
- Japan
- Prior art keywords
- port
- rotary table
- drain
- nitrogen gas
- introducing nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000012299 nitrogen atmosphere Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12683689U JPH0365238U (en]) | 1989-10-30 | 1989-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12683689U JPH0365238U (en]) | 1989-10-30 | 1989-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365238U true JPH0365238U (en]) | 1991-06-25 |
Family
ID=31674626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12683689U Pending JPH0365238U (en]) | 1989-10-30 | 1989-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365238U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006122545A (ja) * | 2004-11-01 | 2006-05-18 | Katsuyoshi Kuwabara | アイシング・サポータ |
-
1989
- 1989-10-30 JP JP12683689U patent/JPH0365238U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006122545A (ja) * | 2004-11-01 | 2006-05-18 | Katsuyoshi Kuwabara | アイシング・サポータ |